Concepedia

L. E. Meade

LE

1

Publications

90

Citations

1

H-Index

1999

Active since

Affiliations

Georgia Institute of Technology(Current)

L. E. Meade is an author at Georgia Institute of Technology specializing in material processing, corrosion, and pressure prediction.

Top concepts

CorrosionMechanicsEngineeringSolid MechanicsMaterial ScienceMicrofabricationSurface PolishingMaterial ProcessingPressure PredictionMechanical Engineering

Publications per year

1999–1999

1

Publications

1

Interfacial Fluid Mechanics and Pressure Prediction in Chemical Mechanical Polishing

Lei Shan, Joseph A. Levert, L. E. Meade et al. · Journal of Tribology · 1999 · 90 citations

Chemical Mechanical Polishing/planarization, Engineering, Mechanical Engineering +18

Rows per page

1–1 of 1