High performance MEMS tactile sensor array with robustness and fabrication simplicity

Abstract

This paper presents a MEMS tactile sensor array that employs a PDMS inverted pyramid sensing membrane adhered over a substrate encapsulating an array of sensor electrodes. Under a vertical pressure, the PDMS membrane deflects towards the substrate, thus enhancing the capacitive coupling between each pair of sensor electrodes through the PDMS dielectric layer; hence an increased device capacitance. Due to the electrode array design, each sensor's nominal capacitance and sensitivity are highly tolerant to fabrication misalignment, thus greatly simplifying fabrication process.