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Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer

Electrical EngineeringEngineeringMicromachinesSensorsMicrofabricationMechanical EngineeringTransducer PrincipleCircular Membranes TransducersPiezoelectricityBiomedical EngineeringPiezoelectric MaterialUltrasoundMicromachined Ultrasonic Transducer