Journal of Materials Science · 2016 · 42 citations · 38 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsAtomic Layer DepositionChemical Vapor DepositionSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsChemical Vapor Deposition PrecursorsElectrical PropertiesFilm Growth MechanismsPlasma-enhanced Atomic Layer DepositionPlasma-enhanced Chemical Vapor DepositionPlasma-enhanced DepositionThin-film Growth KineticsThin-film Growth Mechanisms
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