Chang-Wan Lee

Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition

Il‐Kwon Oh, Kangsik Kim, Zonghoon Lee et al. · Chemistry of Materials · 2014 · 133 citations

Natural Sciences, Materials Engineering, Materials Science +17

Atomic layer deposition of Y2O3 and yttrium-doped HfO2 using a newly synthesized Y(iPrCp)2(N-iPr-amd) precursor for a high permittivity gate dielectric

Jae‐Seung Lee, Woo‐Hee Kim, Il‐Kwon Oh et al. · Applied Surface Science · 2014 · 66 citations

Natural Sciences, Materials Engineering, Materials Science +16

Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor

Hanearl Jung, Woo‐Hee Kim, Il‐Kwon Oh et al. · Journal of Materials Science · 2016 · 42 citations

Natural Sciences, Materials Engineering, Materials Science +17

The effect of La2O3-incorporation in HfO2 dielectrics on Ge substrate by atomic layer deposition

Il-Kwon Oh, Min‐Kyu Kim, Jae‐Seung Lee et al. · Applied Surface Science · 2013 · 38 citations

Natural Sciences, Materials Engineering, Materials Science +16

Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process

Woo‐Hee Kim, Il-Kwon Oh, Min‐Kyu Kim et al. · Journal of Materials Chemistry C · 2014 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +17