Dielectric film etching in semiconductor device manufacturing

The Theory of Collectors in Gaseous Discharges

H. M. Mott-Smith, Irving Langmuir · Physical Review · 1926 · 1.6K citations

Natural Sciences, Electrical Engineering, Physics +16

Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density

J. W. Coburn, Min Chen · Journal of Applied Physics · 1980 · 880 citations

Natural Sciences, Physics, Optics +16

Low Temperature Chemical Vapor Deposition Method Utilizing an Electron Cyclotron Resonance Plasma

Seitaro Matsuo, Mikiho Kiuchi · Japanese Journal of Applied Physics · 1983 · 395 citations

Natural Sciences, Materials Engineering, Materials Science +17

Application of RF Discharges to Sputtering

L. I. Maissel · IBM Journal of Research and Development · 1970 · 258 citations

Natural Sciences, Electrical Engineering, Physics +13

Novel radio-frequency induction plasma processing techniques

John H. Keller, John Forster, Michael Barnes · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 241 citations

Natural Sciences, Electrical Engineering, Physics +14