John H. Keller

Transport of dust particles in glow-discharge plasmas

Michael Barnes, John H. Keller, John Forster et al. · Physical Review Letters · 1992 · 680 citations

Engineering, Physics, Glow Discharge +9

Plasma potentials of 13.56-MHz rf argon glow discharges in a planar system

Klaus Köhler, J. W. Coburn, D. E. Horne et al. · Journal of Applied Physics · 1985 · 398 citations

Electrical Engineering, Grounded Electrode, Engineering +12

Novel radio-frequency induction plasma processing techniques

John H. Keller, John Forster, Michael Barnes · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 240 citations

Electrical Engineering, Plasma Electronics, Space Plasma Physics +13

Inductive plasmas for plasma processing

John H. Keller · Plasma Sources Science and Technology · 1996 · 158 citations

Electrical Engineering, Engineering, Microfabrication +8

Electrical Properties of RF Sputtering Systems

John H. Keller, William B. Pennebaker · IBM Journal of Research and Development · 1979 · 115 citations

Electrical Engineering, Engineering, Complete Electrical Characterization +14