Concepedia

Michael Barnes

MB

Statistics

Publications

16

Citations

1.8K

H-Index

14

Active since

1987

Affiliations

IBM (United States)(Current)

University of Michigan

University of California, Los Angeles

Lam Research (United States)

University of Illinois Urbana-Champaign

Michael Barnes is an author at IBM (United States) specializing in plasma physics, physics, and natural sciences.

Publications per year

1987–2016

16

Publications

16

Transport of dust particles in glow-discharge plasmas

Michael Barnes, John H. Keller, John Forster et al. · Physical Review Letters · 1992 · 681 citations

Natural Sciences, Physics, Plasma Physics +14

Novel radio-frequency induction plasma processing techniques

John H. Keller, John Forster, Michael Barnes · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 241 citations

Natural Sciences, Electrical Engineering, Physics +14

Large-signal time-domain modeling of low-pressure rf glow discharges

Michael Barnes, Tina J. Cotler, M.E. Elta · Journal of Applied Physics · 1987 · 149 citations · Full text

Engineering, Electrical Engineering, Physics +14

A three-dimensional model for inductively coupled plasma etching reactors: Azimuthal symmetry, coil properties, and comparison to experiments

Mark J. Kushner, Wenli Collison, Michael Grapperhaus et al. · Journal of Applied Physics · 1996 · 113 citations

Natural Sciences, Electrical Engineering, Physics +15

Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow discharge

Michael Barnes, John Forster, John H. Keller · Applied Physics Letters · 1993 · 98 citations

Natural Sciences, Physics, Plasma Physics +10

1–5 of 16