Concepedia

Michael Barnes

MB

Statistics

Publications

16

Citations

1.7K

H-Index

14

Active since

1987

Affiliations

IBM (United States)(Current)

University of Michigan

University of California, Los Angeles

Lam Research (United States)

University of Illinois Urbana-Champaign

Michael Barnes is an author at IBM (United States) specializing in engineering, physics, and instrumentation.

Top concepts

EngineeringPhysicsPlasma PhysicsInstrumentationElectrical EngineeringApplied PhysicsPlasma SimulationPlasma TheoryPlasma ScienceMicroelectronics

Publications per year

1987–2016

16

Publications

16

Transport of dust particles in glow-discharge plasmas

Michael Barnes, John H. Keller, John Forster et al. · Physical Review Letters · 1992 · 680 citations

Engineering, Physics, Glow Discharge +9

Novel radio-frequency induction plasma processing techniques

John H. Keller, John Forster, Michael Barnes · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 240 citations

Electrical Engineering, Plasma Electronics, Space Plasma Physics +13

Large-signal time-domain modeling of low-pressure rf glow discharges

Michael Barnes, Tina J. Cotler, M.E. Elta · Journal of Applied Physics · 1987 · 144 citations · Full text

Electrical Engineering, Plasma Electronics, Engineering +13

A three-dimensional model for inductively coupled plasma etching reactors: Azimuthal symmetry, coil properties, and comparison to experiments

Mark J. Kushner, Wenli Collison, Michael Grapperhaus et al. · Journal of Applied Physics · 1996 · 112 citations

Electrical Engineering, Icp Reactor, Engineering +13

Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow discharge

Michael Barnes, John Forster, John H. Keller · Applied Physics Letters · 1993 · 98 citations

Electrical Engineering, Plasma Electronics, Engineering +14

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