Concepedia

Tina J. Cotler

TJ

6

Publications

323

Citations

6

H-Index

1987

Active since

Affiliations

University of Michigan(Current)

IBM (United States)

Tina J. Cotler is an author at University of Michigan specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringPhysicsThin FilmsSurface ScienceMicroelectronicsMicrofabricationNatural SciencesComputational Electromagnetics

Publications per year

1987–1994

6

Publications

6

Large-signal time-domain modeling of low-pressure rf glow discharges

Michael Barnes, Tina J. Cotler, M.E. Elta · Journal of Applied Physics · 1987 · 144 citations · Full text

Electrical Engineering, Plasma Electronics, Engineering +13

A staggered-mesh finite-difference numerical method for solving the transport equations in low pressure rf glow discharges

Michael Barnes, Tina J. Cotler, M.E. Elta · Journal of Computational Physics · 1988 · 70 citations · Full text

Numerical Analysis, Electrical Engineering, Engineering +9

High Quality Plasma‐Enhanced Chemical Vapor Deposited Silicon Nitride Films

Tina J. Cotler, J. Chapple-Sokol · Journal of The Electrochemical Society · 1993 · 43 citations

Materials Science, Lpcvd Films, High Temperature Materials +13

A Monte Carlo microtopography model for investigating plasma/reactive ion etch profile evolution

Tina J. Cotler, Michael Barnes, M.E. Elta · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 25 citations

Engineering, Electron-beam Lithography, Physics +15

Plasma-etch technology

Tina J. Cotler, M.E. Elta · IEEE Circuits and Devices Magazine · 1990 · 23 citations

Electrical Engineering, Plasma Electronics, Engineering +10

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