M.E. Elta

The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges

P. J. Hargis, K. E. Greenberg, Paul Miller et al. · Review of Scientific Instruments · 1994 · 330 citations · Full text

Electrical Engineering, Plasma Electronics, Engineering +11

Large-signal time-domain modeling of low-pressure rf glow discharges

Michael Barnes, Tina J. Cotler, M.E. Elta · Journal of Applied Physics · 1987 · 144 citations · Full text

Electrical Engineering, Plasma Electronics, Engineering +13

Control of semiconductor manufacturing equipment: real-time feedback control of a reactive ion etcher

B.A. Rashap, Stéphane Lafortune, James Moyne et al. · IEEE Transactions on Semiconductor Manufacturing · 1995 · 73 citations

Engineering, Flow Control, Real-time Control Technology +20

A staggered-mesh finite-difference numerical method for solving the transport equations in low pressure rf glow discharges

Michael Barnes, Tina J. Cotler, M.E. Elta · Journal of Computational Physics · 1988 · 70 citations · Full text

Numerical Analysis, Electrical Engineering, Engineering +9

Mixed tunneling and avalanche mechanisms in p-n junctions and their effects on microwave transit-time devices

M.E. Elta, G.I. Haddad · IEEE Transactions on Electron Devices · 1978 · 53 citations

Engineering, Mixed Tunneling, P-n Junctions +19