K. E. Greenberg

The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges

P. J. Hargis, K. E. Greenberg, Paul Miller et al. · Review of Scientific Instruments · 1994 · 332 citations · Full text

Natural Sciences, Electrical Engineering, Microelectronics +14

An Inductively-Coupled Plasma Source for the Gaseous Electronics Conference Rf Reference Cell

Paul Miller, G. A. Hebner, K. E. Greenberg et al. · Journal of Research of the National Institute of Standards and Technology · 1995 · 221 citations · Full text

Natural Sciences, Electrical Engineering, Physics +15

The Gaseous Electronics Conference RF Reference Cell - An Introduction

James K. Olthoff, K. E. Greenberg · Journal of Research of the National Institute of Standards and Technology · 1995 · 104 citations · Full text

Engineering, Electrical Engineering, Materials Science +11

Analysis of the particle interactions in a two-dimensional-plasma dust crystal and the use of dust as a probe of the time-averaged presheath electric field

G. A. Hebner, M. E. Riley, K. E. Greenberg · Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics · 2002 · 72 citations

Natural Sciences, Physics, Interstellar Medium +16

Electron and metastable densities in parallel-plate radio-frequency discharges

K. E. Greenberg, G. A. Hebner · Journal of Applied Physics · 1993 · 65 citations · Full text

Natural Sciences, Physics, Plasma Physics +14