K. E. Greenberg - Concepedia

Concepedia

Author

K. E. Greenberg

Sandia National Laboratories

Also Known As

K. E. Greenberg, K. Greenberg, K.E. Greenberg

33

Publications

1.1K

Citations

13

H-Index

37

Concepts

All Affiliations

Sandia National Laboratories University of Illinois Urbana-Champaign University of New Mexico National Institute of Standards and Technology

KE

About

K. E. Greenberg is an author at Sandia National Laboratories specializing in engineering, physics, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	11	12	709
2	Applied Physics	9	9	269
3	Natural Sciences	8	8	251
4	Electrical Engineering	6	6	511
5	Chemistry	4	4	91

K. E. Greenberg

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16

Publications

1.1K

Citations

13

H-Index

	Year	Citations
The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges P. J. Hargis, K. E. Greenberg, Paul Miller, Review of Scientific Instruments Electrical EngineeringPlasma ElectronicsEngineeringGlow DischargePlasma Theory	1994	330
An Inductively-Coupled Plasma Source for the Gaseous Electronics Conference Rf Reference Cell Paul Miller, G. A. Hebner, K. E. Greenberg, Journal of Research of the National Institute of Standards and Technology	1995	220
The Gaseous Electronics Conference RF Reference Cell - An Introduction James K. Olthoff, K. E. Greenberg Journal of Research of the National Institute of Standards and Technology	1995	104
Analysis of the particle interactions in a two-dimensional-plasma dust crystal and the use of dust as a probe of the time-averaged presheath electric field G. A. Hebner, M. E. Riley, K. E. Greenberg Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics Particle InteractionsEngineeringPhysicsPlasma SimulationApplied Physics	2002	72
Electron and metastable densities in parallel-plate radio-frequency discharges K. E. Greenberg, G. A. Hebner Journal of Applied Physics	1993	64
Kinetic processes of NF3 etchant gas discharges K. E. Greenberg, J. T. Verdeyen Journal of Applied Physics EngineeringPhysicsProduct Formation KineticsCombustion ScienceNatural Sciences	1985	54
Comparison of the Etching and Plasma Characteristics of Discharges in CF 4 and NF 3 N.J. Ianno, K. E. Greenberg, J. T. Verdeyen Journal of The Electrochemical Society EngineeringGlow DischargeCf 4Plasma ProcessingNf 3	1981	48
Electric-field measurements in 13.56 MHz helium discharges K. E. Greenberg, G. A. Hebner Applied Physics Letters Electrical EngineeringEngineeringPhysicsMhz Helium DischargesNatural Sciences	1993	45
Negative ion densities in NF3 discharges K. E. Greenberg, G. A. Hebner, J. T. Verdeyen Applied Physics Letters Electron DensityElectrical EngineeringEngineeringPhysicsNatural Sciences	1984	40
Theoretical and experimental study of low-temperature, capacitively coupled, radio-frequency helium plasmas M. E. Riley, K. E. Greenberg, G. A. Hebner, Journal of Applied Physics EngineeringPlasma SciencePlasma PhysicsElectron PhysicPlasma Theory	1994	35

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