Tactile microgripper for automated handling of microparts

Analysis of Bi-Metal Thermostats

S. Timoshenko · Journal of the Optical Society of America · 1925 · 2.4K citations

Natural Sciences, Materials Science, Physics +7

A graphical representation of the piezoresistance coefficients in silicon

Yozo Kanda · IEEE Transactions on Electron Devices · 1982 · 897 citations

Natural Sciences, Materials Engineering, Materials Science +10

Thermally excited silicon microactuators

W. Riethmüller, W. Benecke · IEEE Transactions on Electron Devices · 1988 · 294 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Integrated thermopile sensors

A.W. van Herwaarden, D.C. van Duyn, B.W. van Oudheusden et al. · Sensors and Actuators A Physical · 1990 · 120 citations

TMAHW etchants for silicon micromachining

Uwe Schnakenberg, W. Benecke, Peter J. de Lange · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 1991 · 109 citations

Engineering, Materials Engineering, Materials Science +17