Polysilicon surface-modification technique to reduce sticking of microstructures

Physical chemistry of surfaces

Choice Reviews Online · 1998 · 11.7K citations

Natural Sciences, Chemistry, Materials Science +17

Physical chemistry of surfaces

Journal of the Franklin Institute · 1961 · 750 citations

Natural Sciences, Chemistry, Materials Science +17

Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theory

Carlos H. Mastrangelo, C.H. Hsu · Journal of Microelectromechanical Systems · 1993 · 488 citations

Engineering, Materials Engineering, Materials Science +17

Formulas for stress, strain, and structural matrices

Choice Reviews Online · 1995 · 323 citations

Engineering, Materials Engineering, Mechanical Engineering +17

Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

R. Legtenberg, H.A.C. Tilmans, J. Elders · Sensors and Actuators A Physical · 1994 · 202 citations · Full text

Engineering, Materials Engineering, Materials Science +12