Polysilicon surface-modification technique to reduce sticking of microstructures - Concepedia

Concepedia

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Polysilicon surface-modification technique to reduce sticking of microstructures

70

Citations

8

References

1996

Year

Youngjoo Yee, Kukjin Chun, Jong Duk Lee, Chang‐Jin Kim

Sensors and Actuators A Physical

Materials SciencePolysilicon Surface-modification TechniqueEngineeringMicrofabricationSurface ScienceSurface TreatmentSurface Processing

References

	Year	Citations

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