Hydrogen desorption and diffusion in PECVD silicon nitride. Application to passivation of CMOS active pixel sensors - Concepedia

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Hydrogen desorption and diffusion in PECVD silicon nitride. Application to passivation of CMOS active pixel sensors

52

Citations

7

References

2007

Year

Daniel Benoit, J.L. Regolini, P. Morin

Microelectronic Engineering

Chemical EngineeringEngineeringSurface ScienceApplied PhysicsHydrogen DesorptionPecvd SiliconSilicon On InsulatorMicroelectronicsCompound SemiconductorSemiconductor Device

References

	Year	Citations

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