Daniel Benoit

Chemical phase segregation during the crystallization of Ge-rich GeSbTe alloys

Marta Agati, Maxime Vallet, S. Joulié et al. · Journal of Materials Chemistry C · 2019 · 61 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

Hydrogen desorption and diffusion in PECVD silicon nitride. Application to passivation of CMOS active pixel sensors

Daniel Benoit, J.L. Regolini, P. Morin · Microelectronic Engineering · 2007 · 52 citations

Engineering, Materials Engineering, Materials Science +16

Effects of surface oxidation on the crystallization characteristics of Ge-rich Ge-Sb-Te alloys thin films

Marta Agati, Clément Gay, Daniel Benoit et al. · Applied Surface Science · 2020 · 44 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

In-situ transmission electron microscopy studies of the crystallization of N-doped Ge-rich GeSbTe materials

Marta Agati, François Renaud, Daniel Benoit et al. · MRS Communications · 2018 · 30 citations

Natural Sciences, Materials Science, Physics +14

Crystallization of Ge-Rich GeSbTe Alloys: The Riddle Is Solved

Eloïse Rahier, Sijia Ran, Nicolas Ratel Ramond et al. · ACS Applied Electronic Materials · 2022 · 29 citations

Natural Sciences, Materials Engineering, Materials Science +17