A recessed-gap capacitive-gate GaAs CCD

Richard E. Colbeth, J.-I. Song, D.V. Rossi, Eric R. Fossum

IEEE Electron Device Letters · 1989 · 11 citations · 5 references

Concepts

Abstract

A MESFET-compatible structure for GaAs capacitive-gate CCDs that eliminates the necessity for submicrometer interelectrode gaps and simplifies device fabrication is presented. This recessed-gap structure solves problems of low gate-channel-gate breakdown and large parasitic gate-to-gate capacitance associated with ultrasmall gaps. Dark current is also reduced. Modeling and experimental results are reported.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>

References

5