Concepedia
Microelectronic Engineering · 1999 · 20 citations · 2 references
EngineeringElectrical EngineeringElectronic MaterialsOpticsPhotonicsElectron Beam LithographyElectron Beam PhysicsBeam ExposureElectron Beam Irradiation EffectsElectron Beam OpticsElectron Beam-induced DamagePhotoresist Development
2
Simple negative resist for deep ultraviolet, electron beam, and x-ray lithography
K Stewart, M. Hatzakis, Jane M. Shaw et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 21 citations
Engineering, Materials Engineering, Materials Science +14
Exposure characteristics of high-resolution negative resists
Kaolin Grace Chiong, Shalom J. Wind, David E. Seeger · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 21 citations
Engineering, Electrical Engineering, Materials Science +11