H. Elsner

Polymer photonic crystal slab waveguides

Christian Liguda, G. T. Bottger, A. Kuligk et al. · Applied Physics Letters · 2001 · 79 citations

Natural Sciences, Materials Engineering, Materials Science +17

Nanometer and high aspect ratio patterning by electron beam lithography using a simple DUV negative tone resist

H. Elsner, H.‐G. Meyer · Microelectronic Engineering · 2001 · 25 citations

Engineering, Materials Engineering, Materials Science +10

Bicrystal submicrometer Josephson junctions and dc SQUIDs

R.P.J. IJsselsteijn, H. Elsner, W. Morgenroth et al. · IEEE Transactions on Applied Superconductivity · 1999 · 23 citations

Natural Sciences, Electrical Engineering, Materials Science +12

Evaluation of ma-N 2400 series DUV photoresist for electron beam exposure

H. Elsner, H.‐G. Meyer, Anja Voigt et al. · Microelectronic Engineering · 1999 · 20 citations

Engineering, Electrical Engineering, Electronic Materials +9

Nanometer patterning using ma-N 2400 series DUV negative photoresist and electron beam lithography

Anya Voigt, H. Elsner, H.‐G. Meyer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 11 citations

Engineering, Electrical Engineering, Materials Science +12