A fine pitch MEMS probe unit for flat panel display as manufacturing MEMS application

Thermally actuated microprobes for a new wafer probe card

Yanwei Zhang, Yongxia Zhang, R. B. Marcus · Journal of Microelectromechanical Systems · 1999 · 118 citations

Engineering, Mechanical Engineering, Actuators +14

A novel 3D process for single-crystal silicon micro-probe structures

Sang-Jun Park, Bong-Hwan Kim, Jongpal Kim et al. · Journal of Micromechanics and Microengineering · 2002 · 37 citations

Engineering, Materials Engineering, Materials Science +17

A BiCMOS active substrate probe-card technology for digital testing

M. Zargari, J. Leung, S.S. Wong et al. · IEEE Journal of Solid-State Circuits · 1999 · 19 citations

Engineering, Electrical Engineering, Analog Electronics +16

A High Performance Solenoid-Type MEMS Inductor

Seonho Seok, Chul Nam, Wonseo Choi et al. · 2001 · 17 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

A novel MEMS silicon probe card

Bong-Hwan Kim, Sang-Jun Park, Byeungleul Lee et al. · 2003 · 14 citations

Engineering, Electrical Engineering, Materials Science +17