Concepedia

A plasmochemical reactor based on a beam-plasma discharge

N. V. Isaev, I. L. Klykov, V. V. Peskov, E. G. Shustin, V.А. Kurnaev

Instruments and Experimental Techniques · 2014 · 13 citations · 5 references

DOI

Abstract

A pilot technological facility implementing a new type of plasmochemical reactor on the basis of a beam-plasma discharge was developed. Specific features of the reactor design are described. The design of the electron injector as the most important unit of the reactor is described. The developed facility was tested and its main characteristics were measured. The technological features of treatment (etching, deposition) of nonconducting structures are presented.

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