Concepedia

Author

H-Y Chu

University of Wisconsin–Madison

Also Known As

H-Y Chu

1

Publications

71

Citations

1

H-Index

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Concepts

All Affiliations

University of Wisconsin–Madison
HC

About

H-Y Chu is an author at University of Wisconsin–Madison specializing in physics, applied physics, and microelectronics.

Top Concepts

#ConceptH-IndexPublicationsCitations

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Engineering

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Applied Physics

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Electrical Engineering

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Physics

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Atomic Physics

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H-Y Chu

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1

Publications

71

Citations

1

H-Index

YearCitations

Arbitrary substrate voltage wave forms for manipulating energy distribution of bombarding ions during plasma processing

M. Patterson, H-Y Chu, A. Wendt

Plasma Sources Science and Technology

2007

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