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A Plasma-Cathode Electron Source for Ribbon-Beam Generation at Forevacuum Pressures

V. A. Burdovitsin

Instruments and Experimental Techniques · 2003 · 11 citations · 1 references

DOI

References

1

Theoretical overview of the large-area plasma processing system (LAPPS)

Wallace M. Manheimer, R. F. Fernsler, Mártin Lampe et al. · Plasma Sources Science and Technology · 2000 · 108 citations

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