A gas chromatographic air analyzer fabricated on a silicon wafer

S.C. Terry, J.H. Jerman, James B. Angell

IEEE Transactions on Electron Devices

Chemical EngineeringAir SamplingEngineeringAnalytical InstrumentationGas Chromatography +12

A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel, F.C.M. van de Pol, S. Bouwstra

Sensors and Actuators

Electrical EngineeringEngineeringMicromachinesMicrofabricationMechanical Engineering +7

Silicon Diffused-Element Piezoresistive Diaphragms

O. N. Tufte, P. W. Chapman, Donald Long

Journal of Applied Physics

EngineeringPressure TransducerMechanical EngineeringVibrationsSoft Robotics +15

Microvalves with bistable buckled polymer diaphragms

C. Goll, W. Bacher, B. Büstgens, +3

Journal of Micromechanics and Microengineering

Materials ScienceEngineeringSoft RoboticsMicromachinesMicrofabrication +13

A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator

Sebastian Böhm, G.J. Burger, M. T. Korthorst, +1

Sensors and Actuators A Physical

EngineeringSoft RoboticsMicromachinesMicrofabricationMechanical Engineering +7

Electrically-activated, micromachined diaphragm valves

H. Jerman

EngineeringFlow ControlMechanical ControlMicrofabricationProportional Control +10

A pressure-balanced electrostatically-actuated microvalve

Michael Huff, M.S. Mettner, T.A. Lober, +1

EngineeringPressure-balanced Electrostatically-actuated MicrovalveNew Microvalve StructureMicrofabricationMechanics +10

An electrostatically actuated polymer microvalve equipped with a movable membrane electrode

C. Goll, W. Bacher, B. Büstgens, +3

Journal of Micromechanics and Microengineering

Materials ScienceElectroactive MaterialEngineeringSoft RoboticsMicrofabrication +12

A microvalve system fabricated by thermoplastic molding

Jens Fahrenberg, W. Bier, D. Maas, +3

Journal of Micromechanics and Microengineering

Materials ScienceEngineeringPolyimide MembraneMicromachinesMicrofabrication +12

AMANDA—surface micromachining, molding, and diaphragm transfer

Werner Karl Schomburg, Ralf Ahrens, W. Bacher, +2

Sensors and Actuators A Physical

EngineeringMicromachinesMicrofabricationMechanical EngineeringAmanda—surface Micromachining +2