Polymer micro valve with a hydraulic piezo-drive fabricated by the AMANDA process

A gas chromatographic air analyzer fabricated on a silicon wafer

S.C. Terry, J.H. Jerman, James B. Angell · IEEE Transactions on Electron Devices · 1979 · 1.4K citations

Chemical Engineering, Air Sampling, Engineering +14

A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel, F.C.M. van de Pol, S. Bouwstra · Sensors and Actuators · 1988 · 616 citations

Electrical Engineering, Engineering, Micromachines +9

Silicon Diffused-Element Piezoresistive Diaphragms

O. N. Tufte, P. W. Chapman, Donald Long · Journal of Applied Physics · 1962 · 267 citations · Full text

Engineering, Pressure Transducer, Mechanical Engineering +17

Microvalves with bistable buckled polymer diaphragms

C. Goll, W. Bacher, B. Büstgens et al. · Journal of Micromechanics and Microengineering · 1996 · 122 citations

Materials Science, Engineering, Soft Robotics +15

A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator

Sebastian Böhm, G.J. Burger, M. T. Korthorst et al. · Sensors and Actuators A Physical · 2000 · 82 citations

Engineering, Soft Robotics, Micromachines +9