Publication | Closed Access
Massively Parallel Dip–Pen Nanolithography with 55 000‐Pen Two‐Dimensional Arrays
313
Citations
14
References
2006
Year
EngineeringElectron-beam LithographyMicroscopyNanodevicesMolecular BiologyMolecular GraphicBeam LithographyMicroscopy MethodAtomic Force MicroscopeNanolithographyBiophysicsNanolithography MethodNanotechnologyParallel PatterningMicrofabricationParallel Dip–pen NanolithographyScanning Probe MicroscopyApplied PhysicsScanning Force MicroscopyTip FeedbackNanofabricationMedicine
Lots of writing on the wall: A simple and flexible approach for performing high-throughput, large-area, direct-write molecular patterning, without tip feedback, is demonstrated by using a 55 000-pen two-dimensional array of atomic force microscope (AFM) cantilevers. The use of low-aspect-ratio pyramidal tips, curved cantilevers, and a novel gravity-driven alignment method allows parallel patterning of molecules across 1-cm2 substrate areas at sub-100-nm resolution. Supporting information for this article is available on the WWW under http://www.wiley-vch.de/contents/jc_2002/2006/z603142_s.pdf or from the author. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.
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