High‐Mobility Low‐Voltage ZnO and Li‐Doped ZnO Transistors Based on ZrO₂ High‐<i>k</i> Dielectric Grown by Spray Pyrolysis in Ambient Air

Abstract

Sequential layers of the high-k dielectric ZrO2 and the electron transporting semiconductors ZnO and Li-doped ZnO are deposited onto conductive indium tin oxide electrodes using spray pyrolysis. With these structures, thin-film transistors are fabricated with operating voltages below 6 V and maximum electron mobilities on the order of 85 cm2 V−1 s−1.