Concepedia

Fixed Beam Moving Stage Electron Beam Lithography of Waveguide Coupling Device Structures

Jason E. Sanabia, Kevin E. Burcham, Joseph Klingfus, Guido Piaszenski, Michael D. Kahl, R. Jede

2012 · 11 citations · 4 references

DOI

Abstract

The Fixed Beam Moving Stage (FBMS) lithography mode is used toward the fabrication of waveguide coupling device structures. Scanning electron microscope metrology is used for the dimensional characterization of the resulting waveguide structures.

References

4

Electron beam lithography writing strategies for low loss, high confinement silicon optical waveguides

Richard Bojko, J. Li, He Li et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 138 citations

, , +17

Athermalizing and Trimming of Slotted Silicon Microring Resonators With UV-Sensitive PMMA Upper-Cladding

Linjie Zhou, Katsunari Okamoto, S. J. Ben Yoo · IEEE Photonics Technology Letters · 2009 · 107 citations

, , +14

Monolithic integration of plasmonic waveguides into a complimentary metal-oxide-semiconductor- and photonic-compatible platform

Shawn Sederberg, Vien Van, A. Y. Elezzabi · Applied Physics Letters · 2010 · 43 citations

, , +18

Enhanced stitching for the fabrication of photonic structures by electron beam lithography

M. Gnan, D.S. Macintyre, Marc Sorel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 21 citations

, , +19