Concepedia

Kevin E. Burcham

KE

3

Publications

65

Citations

3

H-Index

1993

Active since

Affiliations

Raith (Germany)(Current)

Kevin E. Burcham is an author at Raith (Germany) specializing in mechanical engineering, microfabrication, and applied physics.

Top concepts

EngineeringApplied PhysicsMicrofabricationMechanical EngineeringEducationPhotonicsMicroscopyTechnology3D PrintingInstrumentation

Publications per year

1993–2017

3

Publications

3

<title>Micromachined silicon cantilever beam accelerometer incorporating an integrated optical waveguide</title>

Kevin E. Burcham, Gregory N. De Brabander, J. T. Boyd · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 41 citations

Engineering, Device Integration, Mechanical Engineering +18

Electron beam lithography using fixed beam moving stage

Iman Khodadad, Nathan Nelson-Fitzpatrick, Kevin E. Burcham et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2017 · 13 citations

Engineering, Nanolithography Method, Electron-beam Lithography +15

Fixed Beam Moving Stage Electron Beam Lithography of Waveguide Coupling Device Structures

Jason E. Sanabia, Kevin E. Burcham, Joseph Klingfus et al. · 2012 · 11 citations

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