Comparison of ICP-AlOx and ALD-Al2O3 Layers for the Rear Surface Passivation of C-Si Solar Cells

Boris Veith, Thorsten Dullweber, Michael Siebert, Christopher Kranz, Florian Werner, N.-P. Harder, Jan Schmidt, B.F.P. Roos, Torsten Dippell, Rolf Brendel

Energy Procedia · 2012 · 36 citations · 10 references

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