Concepedia

Very low surface recombination velocities on p-type silicon wafers passivated with a dielectric with fixed negative charge

G. Agostinelli, A. Delabie, P. Vitanov, Z. Alexieva, Harold Dekkers, Stefaan De Wolf, G. Beaucarne

Solar Energy Materials and Solar Cells · 2006 · 435 citations · 4 references

DOI

Concepts

References

4

Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence

Anne C. Dillon, A. W. Ott, J. Douglas Way et al. · Surface Science · 1995 · 459 citations

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Evidence of a high density of fixed negative charges in an insulation layer compound on silicon

Dirk König, M. Rennau, M. Henker et al. · Thin Solid Films · 2001 · 17 citations

, , +13

Minimization of mechanical and chemical strain at dielectric-semiconductor and internal dielectric interfaces in stacked gate dielectrics for advanced CMOS devices

Gerry Lucovsky · AIP conference proceedings · 2001 · 16 citations · Full text

, , +17

Deposition and dielectric properties of (Al2O3) x (TiO2)1−x thin films

P. Vitanov, A. Harizanova, T. Ivanova et al. · Journal of Materials Science Materials in Electronics · 2003 · 13 citations

, , +14