Journal of Materials Science Materials in Electronics · 2003 · 13 citations · 2 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationMaterials ChemistryThin FilmsAluminum OxidesDielectricsOxide SemiconductorsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsFerroelectric Thin FilmsThin Oxide FilmsThin Oxide LayersThin-film DielectricsThin-film Oxides
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