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Gatestacks for scalable high-performance FinFETs
G. Vellianitis, J. Pétry, Bartek Pawlak et al. · 2007 · 32 citations
High-k Dielectrics and Metal Gates for Future Generation Memory Devices
J. A. Kittl, Karl Opsomer, M. Popovici et al. · ECS Transactions · 2009 · 11 citations
Natural Sciences, Materials Engineering, Materials Science +17
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