Concepedia

Publication | Open Access

The effect of composition on the bond structure and refractive index of silicon nitride deposited by HWCVD and PECVD

DOIFull Paper Access

42

Citations

19

References

2009

Year

V. Verlaan, A.D. Verkerk, W.M. Arnoldbik, C.H.M. van der Werf, Reuben M. Bakker, Z.S. Houweling, I.G. Romijn, D. M. Borsa, A.W. Weeber, S.L. Luxembourg,
Thin Solid Films

References

YearCitations

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