Piezoelectrically driven silicon beam force sensor

R.F. planar magnetron sputtered ZnO films II: Electrical properties

F.R. Blom, F.C.M. van de Pol, G.J. Bauhuis et al. · Thin Solid Films · 1991 · 69 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

Thin-film ZnO as micromechanical actuator at low frequencies

F.R. Blom, D.J. Yntema, F.C.M. van de Pol et al. · Sensors and Actuators A Physical · 1990 · 59 citations · Full text

Engineering, Materials Engineering, Materials Science +15

Integrated sensors: interfacing electronics to a non-electronic world

K.D. Wise · Sensors and Actuators · 1981 · 31 citations · Full text

Engineering, Bioengineering, Electrical Engineering +12

Resonating silicon beam force sensor

F.R. Blom, S. Bouwstra, J.H.J. Fluitman · Sensors and Actuators · 1989 · 31 citations · Full text

Engineering, Electrical Engineering, Physics +12

Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges

H.A.C. Tilmans, S. Bouwstra, J.H.J. Fluitman et al. · Sensors and Actuators A Physical · 1990 · 13 citations · Full text

Engineering, Materials Science, Mechanical Engineering +16