Integrated sensors: interfacing electronics to a non-electronic world

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

A batch-fabricated silicon accelerometer

L. M. Roylance, James B. Angell · IEEE Transactions on Electron Devices · 1979 · 507 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A Water-Amine-Complexing Agent System for Etching Silicon

R. M. Finne, D. L. Klein · Journal of The Electrochemical Society · 1967 · 309 citations

Engineering, Materials Engineering, Materials Science +17

A monolithic capacitive pressure sensor with pulse-period output

C. Sander, James W. Knutti, J.D. Meindl · IEEE Transactions on Electron Devices · 1980 · 189 citations

Engineering, Mechanical Engineering, Instrumentation +15

A high-sensitivity integrated-circuit capacitive pressure transducer

Wen H. Ko, Minhang Bao, Yeun-Ding Hong · IEEE Transactions on Electron Devices · 1982 · 136 citations

Engineering, Electrical Engineering, Mechanical Engineering +17