Three-Dimensional Shell Fabrication Using Blow Molding of Bulk Metallic Glass

Abstract

A blow molding method based on thermoplastic forming of bulk metallic glasses (BMGs) is used to fabricate 3-D microshells. The 3-D microshells are attached to the Si wafer through mechanical locking, which is achieved in the same processing step. Versatile sizes and shapes of the 3-D shells can be precisely controlled. High strength ( >; 1 GPa), elasticity (~ 2%), and controlled surface roughness (<; 2 nm), which are achievable for BMGs, suggest their potential use in devices, including resonators, microlenses, microfluidic, and packaging.