Concepedia

Errors in near-surface and interfacial profiling of boron and arsenic

W. Vandervorst, Tom Janssens, Bert Brijs, Thierry Conard, Cedric Huyghebaert, Jens Frühauf, A. Bergmaier, G. Dollinger, Temel Büyüklimanli, Kenji Kimura

Applied Surface Science · 2004 · 42 citations · 9 references

DOI

Concepts

References

9

The Thickogram: a method for easy film thickness measurement in XPS

Peter J. Cumpson · Surface and Interface Analysis · 2000 · 187 citations

, , +8

Depth profiling using ultra-low-energy secondary ion mass spectrometry

Mark Dowsett · Applied Surface Science · 2002 · 64 citations

, , +9

Secondary ion mass spectrometry profiling of shallow, implanted layers using quadrupole and magnetic sector instruments

Wilfried Vandervorst, F. R. Shepherd · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 55 citations

, , +15

Elastic recoil detection with single atomic layer depth resolution

G. Dollinger, C.M. Frey, A. Bergmaier et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1998 · 36 citations

, , +7

Some applications of high-resolution RBS and ERD using a magnetic spectrometer

Kenji Kimura, K. Nakajima, Michi-hiko Mannami · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1998 · 27 citations

, , +8