The Thickogram: a method for easy film thickness measurement in XPS

Abstract

We describe a simple graphical method for measuring film thickness by XPS, which we call a Thickogram. This method can be used even when the film and substrate peaks have very different kinetic energies and incorporates the effects of elastic scattering within the recommended range of take-off angles. The Thickogram may also be useful when measuring film thickness by AES, though this is less commonly required than in XPS. Copyright © 2000 John Wiley & Sons, Ltd.