Concepedia

The Thickogram: a method for easy film thickness measurement in XPS

Peter J. Cumpson

Surface and Interface Analysis · 2000 · 187 citations · 13 references

DOI

Concepts

Abstract

We describe a simple graphical method for measuring film thickness by XPS, which we call a Thickogram. This method can be used even when the film and substrate peaks have very different kinetic energies and incorporates the effects of elastic scattering within the recommended range of take-off angles. The Thickogram may also be useful when measuring film thickness by AES, though this is less commonly required than in XPS. Copyright © 2000 John Wiley & Sons, Ltd.

References

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