Experimental modal analysis for microelectromechanical systems

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Engineering, Materials Science, Mechanical Engineering +15

Characteristics of polysilicon resonant microbeams

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Engineering, Materials Science, Microfabrication +6

Parameter estimation from frequency response measurements using rational fraction polynomials

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Engineering, Mechanical Engineering, Structural Dynamics +15

Stroboscopic interferometer system for dynamic MEMS characterization

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Engineering, Electrical Engineering, Mechanical Engineering +17

A system for the dynamic characterization of microstructures

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Engineering, Materials Science, Mechanical Engineering +17