Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

Ferroelectric Ceramics: History and Technology

Gene H. Haertling · Journal of the American Ceramic Society · 1999 · 4K citations

Natural Sciences, Materials Engineering, Materials Science +17

{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

Nicolas Ledermann, Paul Muralt, J. Baborowski et al. · Sensors and Actuators A Physical · 2003 · 394 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

Analysis of tip deflection and force of a bimetallic cantilever microactuator

Wen-Hwa Chu, Mehran Mehregany, Robert L. Mullen · Journal of Micromechanics and Microengineering · 1993 · 250 citations

Engineering, Mechanical Engineering, Applied Mechanics +13

Measurement of mechanical properties for MEMS materials

Taechung Yi, Chang‐Jin Kim · Measurement Science and Technology · 1999 · 200 citations

Natural Sciences, Materials Science, Mechanical Engineering +15

Performance analysis of piezoelectric cantilever bending actuators

Qingming Wang, L. E. Cross · Ferroelectrics · 1998 · 195 citations

Engineering, Mechanical Engineering, Actuators +14