Concepedia
Journal of Mechanical Science and Technology · 2005 · 12 citations · 8 references
EngineeringManufacturing EngineeringMechanical EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationMems ActuatorsMems CharacterizationMems DesignMems FabricationMems TestingMicromachiningMechanical Testing Of Mems DevicesMems MetrologyMicroturbine Systems
8
The Fluid Mechanics of Microdevices—The Freeman Scholar Lecture
Mohamed Gad‐el‐Hak · Journal of Fluids Engineering · 1999 · 1.3K citations
Engineering, Manufacturing Engineering, Mechanical Engineering +16
Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher
Arturo A. Ayón, Rebecca A. Braff, C. C. Lin et al. · Journal of The Electrochemical Society · 1999 · 411 citations
Engineering, Materials Engineering, Materials Science +13
A six-wafer combustion system for a silicon micro gas turbine engine
A. Mehra, Xin Zhang, Arturo A. Ayón et al. · Journal of Microelectromechanical Systems · 2000 · 222 citations
Engineering, Chemical Engineering, Mechanical Engineering +17
The Influence Of Knudsen Number On The Hydrodynamic Development Length Within Parallel Plate Micro-channels
Robert W. Barber, David R. Emerson · WIT transactions on engineering sciences · 2002 · 60 citations
Engineering, Mechanical Engineering, Fluid Dynamics +11
Frequency response analysis of cylindrical shells conveying fluid using finite element method
Young‐Soo Seo, Weui-Bong Jeong, Wan-Suk Yoo et al. · Journal of Mechanical Science and Technology · 2005 · 29 citations
Engineering, Computational Engineering, Mechanical Engineering +16