Concepedia
Microelectronic Engineering · 1995 · 27 citations · 2 references
EngineeringComputer EngineeringEnergy ManagementLow-power DesignMicrofabricationEnergy-efficient ManufacturingMask DesignMask FabricationPower-aware DesignEnergy ControlEnergy Management ControlEnergy Shaping ControlProcess Energy Consumption
2
Compound magnetic and electrostatic lenses for low-voltage applications
J. Frosien, Erich Plies, Klaus Anger · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 79 citations
Natural Sciences, Materials Science, Physics +13
Verification of a proximity effect correction program in electron-beam lithography
E. Kratschmer · Journal of Vacuum Science and Technology · 1981 · 31 citations
Engineering, Materials Engineering, Materials Science +9