Statistics
Publications
2
Citations
41
H-Index
2
Active since
1995
Affiliations
Jenoptik (Germany)(Current)
M. Zierbock is an author at Jenoptik (Germany) specializing in mask fabrication, microfabrication, and engineering.
Publications per year
1995–1996
2
2
Low energy lithography; energy control and variable energy exposure
W. Bru ̈nger, E. B. Kley, B. Schnabel et al. · Microelectronic Engineering · 1995 · 27 citations
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