E. B. Kley

Sparsity-based single-shot subwavelength coherent diffractive imaging

Alexander Szameit, Yoav Shechtman, E. Osherovich et al. · Nature Materials · 2012 · 216 citations · Full text

Natural Sciences, Physics, Biomedical Imaging +15

Low energy lithography; energy control and variable energy exposure

W. Bru ̈nger, E. B. Kley, B. Schnabel et al. · Microelectronic Engineering · 1995 · 27 citations

Engineering, Computer Engineering, Energy Management +10

Enhanced e-beam pattern writing for nano-optics based on character projection

E. B. Kley, Holger Schmidt, Uwe D. Zeitner et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 21 citations

Natural Sciences, Materials Science, Nanotechnology +7