J. Frosien

Compound magnetic and electrostatic lenses for low-voltage applications

J. Frosien, Erich Plies, Klaus Anger · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 79 citations

Natural Sciences, Materials Science, Physics +13

High performance electron optical column for testing ICs with submicrometer design rules

J. Frosien, Erich Plies · Microelectronic Engineering · 1987 · 48 citations

Engineering, Computer Engineering, Electrical Engineering +13

High precision electron optical system for absolute and CD-measurements on large substrates

J. Frosien, Stefan Lanio, H.P. Feuerbaum · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 1995 · 18 citations

Engineering, Materials Science, Physics +11

Aligned multilayer structure generation by electron microprojection

J. Frosien, B. Lischke, Klaus Anger · Journal of Vacuum Science and Technology · 1979 · 14 citations

Engineering, Materials Engineering, Materials Science +16

Electron Beam Testing of Submicron Structures

J. Frosien, E. Kehrberg, M. Sturm et al. · Journal of The Electrochemical Society · 1988 · 10 citations

Engineering, Electrical Engineering, Physics +15