Concepedia
Statistics
Publications
1
Citations
18
H-Index
Active since
1995
Stefan Lanio is an author specializing in engineering, materials science, and optical spectroscopy.
Publications per year
1995–1995
High precision electron optical system for absolute and CD-measurements on large substrates
J. Frosien, Stefan Lanio, H.P. Feuerbaum · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 1995 · 18 citations
Engineering, Materials Science, Physics +11
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