Statistics
Publications
5
Citations
68
H-Index
5
Active since
1983
Affiliations
Siemens (Germany)(Current)
M. Sturm is an author at Siemens (Germany) specializing in engineering, electrical engineering, and microelectronics.
Publications per year
1983–2006
5
5
Electron beam tester integrated into a VLSI tester
H. Niijima, Y. Tokunaga, S. Koshizuka et al. · 2003 · 13 citations
Engineering, Computer Engineering, Electrical Engineering +11
R.G. Bankras, J. Holleman, Jurriaan Schmitz et al. · Chemical Vapor Deposition · 2006 · 13 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
Electron Beam Testing of Submicron Structures
J. Frosien, E. Kehrberg, M. Sturm et al. · Journal of The Electrochemical Society · 1988 · 10 citations
Material surfaces for electron‐optical equipment
Klaus Anger, B. Lischke, M. Sturm · Scanning · 1983 · 10 citations
Natural Sciences, Materials Engineering, Materials Science +14
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