Journal of Vacuum Science and Technology · 1979 · 14 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationNanotechnologyElectron Beam LithographyElectron MicroscopyMask DesignMask FabricationMicrofabrication ProcessesTransmission Electron MicroscopyAccuracyAlignment TechniquesElectron Beam OpticsHigh-resolution Electron MicroscopyHigh-resolution ImagingMask AlignmentScanning Electron MicroscopyScanning Electron Microscopy Analysis
Electron microprojection allows the fast transfer of structures with high resolution. Using a projector with a 1:4 image scale, a resolution of 0.3 μm across an 8×8 mm image field is experimentally obtained. The development of a novel alignment technique assures the superposition of several mask levels with an alignment accuracy better than 0.1 μm.