Statistics
Publications
2
Citations
41
H-Index
2
Active since
1995
Affiliations
Jenoptik (Germany)(Current)
Ines A. Stolberg is an author at Jenoptik (Germany) specializing in mask fabrication, engineering, and microfabrication.
Publications per year
1995–1996
2
2
Low energy lithography; energy control and variable energy exposure
W. Bru ̈nger, E. B. Kley, B. Schnabel et al. · Microelectronic Engineering · 1995 · 27 citations
1–2 of 2