Micromachined ultrasonic motor based on parametric polycrystalline silicon plate excitation

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Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 488 citations

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Engineering, Materials Engineering, Materials Science +15

Piezoelectric micromotors for microrobots

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The Influence of Dynamical Imperfection on the Vibration of Rotating Disks

S. A. Tobias, RONALD N. ARNOLD · Proceedings of the Institution of Mechanical Engineers · 1957 · 140 citations

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