A scalable anti-sticking layer process via controlled evaporation - Concepedia

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A scalable anti-sticking layer process via controlled evaporation

32

Citations

6

References

2014

Year

Christian Steinberg, Khalid Dhima, Daniel Blenskens, André Mayer, Si Wang, Marc Papenheim, Hella‐Christin Scheer, Joachim Zajadacz, K. Zimmer

Microelectronic Engineering

Materials ScienceEngineeringMicrofabricationSurface ScienceApplied PhysicsElectronic PackagingMulti-functional CoatingSurface Processing

References

	Year	Citations

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